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Picosecond UV Single Photon Detectors with Lateral Drift Field: Concept and Technologies

机译:具有侧向漂移场的皮秒紫外单光子探测器:概念   和技术

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摘要

Group III-V semiconductor materials are being considered as a Si replacementfor advanced logic devices for quite some time. Advances in III-V processingtechnologies, such as interface and surface passivation, large area deepsubmicron lithography with high-aspect ratio etching primarily driven by theMOSFET development can also be used for other applications. In this paper wewill focus on photodetectors with the drift field parallel to the surface. Wecompare the proposed concept to the state-of-the-art Si-based technology anddiscuss requirements which need to be satisfied for such detectors to be usedin a single photon counting mode in blue and ultraviolet spectral region withabout 10 ps photon timing resolution essential for numerous applicationsranging from high-energy physics to medical imaging.
机译:在相当长的一段时间内,III-V族半导体材料被认为是高级逻辑器件的硅替代品。 III-V加工技术的进步,例如界面和表面钝化,具有大纵横比蚀刻的大面积深亚微米光刻技术(主要由MOSFET的发展驱动)也可以用于其他应用。在本文中,我们将重点研究漂移场平行于表面的光电探测器。我们将提出的概念与最新的基于Si的技术进行了比较,并讨论了将此类检测器用于蓝色和紫外光谱区域中的单个光子计数模式时需要满足的要求,其中约10 ps的光子定时分辨率对于许多应用范围从高能物理到医学成像。

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